Vacuum           (kPa)

-60→-85

-60→-85

-60→-85

Compressed Air     (MPa)

0.6-0.7

0.6-0.7

0.6-0.7

External Dimension   (mm)

1340×900×1610

1980×1065×1870

2130×1410×2130

Installation Dimension (mm)

2000×1500×2400

3000×3000×3200

3000×3600×3200

Weight             (kg)

approx. 430

approx. 1500

approx. 1800