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Description:
- Compact tabletop UV Curing system- Up to 8 inch(200mm) wafer
- Uniform exposure
- Small size
- low cost
Overview
UV Curing System, supporting up to 200mm/8 inches wafers, isdesigned as a compact tabletop system for the first time in theindustry, although including High-pressure mercury UVcuring lamp specifications.
It''s low cost system.
* Display(Touch) panel is easy to understand status.
Features
- Low-temperature exposure similar to that of regular-grade oflow-pressure mercury lamp, is achieved even with high-pressure lampspecification.
- Powerful exposure by means of 1kW UV light source.
- Uniform exposure while rotating work pieces.
- It allows total curing of film surface by means of N2purge.
- Easy production control due to built-in lamp integratingcounter.
- Safety conscience design with Interlock & Built-in coolingfan.
- Compact and tabletop size.


