For large size or a mass of substrates coating or deposition, they always needs the vacuum coater with a large-scale chamber. The large scale ion vacuum coater developed by Tecsun is one of the largest plants in the vacuum industry. The diameter of chamber is more than 2 meters; The height is more than 5 meters.
Features of coater
The large scale ion vacuum coater produced by Tecsun uses horizontal type. There are revolution racks, planetary rotation racks and swing multiple racks in the coater, which can realize three-dimensional motion to make single side coating or all round coating for irregular shape substrates.
The large scale ion vacuum coater is equipped with high speed pump system which lowers coating cost. There are a few sets of high performance arc targets which are suitable to coat metallic films, alloy films or compound films through reactive coating technology. Also, the coater can be equipped with magnetron sputtering cathode or linear ion source according to customers' needs which can realize more coating functions.
The large scale ion vacuum coater applies automatic control system with industrial computer and color touch screen that realizes the whole operation process automatically. The machine is designed according to ergonomics, the workpieces car and doors are electric control by remote controls.



