Continuous coating on-line plant
Type: ITO transparent and electro-conductive glass coating production line, Large scale plastic flat coating production line
Vacuum Chamber: Upright stainless steel
Vacuum Pump: Oil diffusion pump / Molecule pump/ Others
Ultimate Vacuum: 2x10-3 Pa
Ion Cleaning system: Sheet cathode/ linear ion source
Sputtering source: DC magnetron sputtering / RF magnetron sputtering
Process Gas: Gas flow control system/ Automatic pressure control system
Heating: Tube stainless steel heater
Driving system: Gear-driven/ friction driven with adjustable speed
Electrical System: PLC automatic control with touch display screen operation / Semi-automatic PLC control with touch display screen
Film: metal film/ oxide film(SiO2, TiO2) / ITO
Application: Large scale deposition ITO, Al, Ni, Cr etc., on glass/PMMA/PC/PET substrates