Characteristics
Coating chamber characterised by a cabinet type, circled water cooling, stainless steel case structure, easy to dismantle.
Arrayed with more advanced ARC 100 arc evaporation source and spin magnetron sputtering target. Easy replacement of Au target, target capacity factor up to 70-80%, good finished film quality.
Accessible programmable logic controller (PLC), automotive or manual operation, multiple self-protection system.
Multi-purpose furnace, suitable for direct in-vacuum-furnace coating, or TiN+Ni (AB coating technology), or magnetron sputtering coating.

Main Technical Data for LD-A Model
* Dimensions of coating chamber: 700(L)X700(W)X810 (H)mm3 Water loop type cooling system stainless steel case
* Valid fitting size: 145 mm(D)X600mm(H)X8 axis
* Spin mode and speed of operation shelf: Planetary (revolution & rotation) 0.5~3 r/min
* Ultimate pressure of coating chamber: 2~2.5X10-3Pa(idle, clean)
* Working pressure recovery time: 8X10-3Pa derived from atmosphere, less than 20min(idle, clean)
* Baking heating: Room temperature250oC, heating power: 6KW
* Arc evaporation source: 1~2KW/set, 4 sets of Arc100 Model or Arc60 Model
* Bombardment voltage: 0~1000V
* Bias voltage: 0~300V, -15A
* Operation period: 60~90min
* Supply power: Three-phase four-wire 380Viexcl; 5%, 50-60Hz, power no less than 30KW
* Air compression: 0.4 ~0.6Mpa
* Water cooling: 0.2~0.3Mpa, iexcl; 25oC, 4m3/hr
* Dimensions of main machine: 2750LX2700WX1900H mm3
* Weight of main machine: 2700kg.