FFD Series Compound Molecular Pumps

1. Operating in any position.
2. High ultimate vacuum degree.
3. High pumping speed.
4. High compression ratio.
5. Low noise.
6. Clean oil-free.
7. Energy saving.
8. Widly used in spectroscopic instruments, electron microscope, leak detector, surface physical and analytical instruments, mass spectrometer, vacuum coating industry, CRT production, semiconsuctor manufacturing, plasma etching, etc;

Main Parameter:            

Type:                                          FFD-800            FFD-1300          FFD1800

Inlet diameter:                        DN160mm         DN200mm        DN250mm

Outlet diameter:                      KF40mm            KF40mm           KF40mm

Pumping speed:                       800L/s               1300L/s           1800L/s

Ultimate pressure:             5x10-7 Pa (metallic seal);  5x10-6 Pa (rubber seal)

Compression ratio:                              N2 : 108 ;  H2 : 4x103

Rotating speed of Motor:      36000r/min        24000r/min        24000r/min

Start-up time:                           < 7min                 < 7min              < 7min

Cooling method:                 Water cooled     Water cooled      Water cooled

Cooling water temperature:    < 24 C                < 24 C               < 24 C

Mounting position:                      Any                      Any                    Any