VENA series Auto RF Match is used into the vacuum thin film coating equipments for the processes such as plasma cleaning, plasma etching, magnetron sputtering, PECVD etc. The main function is to realize the auto matching function, and solves the technical vacancy.

Currently the domestic manufacturers mainly utilize the hand operated RF Match. And it is not so convenient to use the hand operated RF Match. Continuous operation is needed to adjust the impedance of the RF Match to achieve the process goal. While, the auto match can fill up the gap and owns the features of speediness, automatism, reliability, high efficiency, accuracy, saving labor and time. The optional RF systematic detection module can real time detect the system's forward power, reflect power, standing wave ratio, RF signal peak voltage, current, DC bias voltage. An in so doing it can make you detect and decrease the process variety. The products cover 500W, 1000W, 2000W.

Features and advantages:
Advantages Features
1Reliability & stability for longtime
2Real time reflect power test and control

3Optimized design. Easy to install, use, and repair
4broad range of matching, suitable for complicate load system
5High efficiency in transmission
6Low noise
7Well shielding
8Strict reliable test.