Fs5000 Series are designed for general purpose flow monitor and control applications. The sensors directly measure mass flow in the designed channel with trace flow detection capability. The lowest flow it can detect is 20 nL/min. These sensors can readily be applied for manifold flow assembly, leak detection, HVAC control, clean room air flow or nitrogen flush monitor and control, environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer.
Fs5001 can be configured to measure flow full scale from 20 sccm to 1000 sccm (1 SLPM). With a full spectrum of customizable adaptors, it can be plug-and-play in many applications.

Features:
Designed for trace flow measurement as low as 20 nL/min
Compact design ready for multiple channel assembly
Fast response time provides solutions for critical applications
Excellent for analytical instrumentation such as GC spectrometer
Manifold adaptors for easy installation at different applications
Intrinsic safe enclosure for wide applications