Conductivity Type: P type
Size: 156× 156± 0.5mm
Geometry: Square
Resistivity: 1Ω/cm-3Ω/cm
Lifetime: ≥ 2μs
Oxygen Concentration: ≤ 1× 1018atom/cm3
Carbon Concentration: ≤ 5× 1016atom/cm3
Thickness: 200μm± 15μm 220μm± 20μm 240μm± 20μm
TTV: ≤ 50μm
BOW: ≤ 30μm
Saw Marks: ≤ 10μm
Edge Chip: Length≤ 0.2mm; Depth≤ 0.5mm; Not more than 2