Lifetime: ≥ 10μs
BOW: ≤ 35 μm
Resistivity: 0.5_3, 3_6, 6_10Ω@cm
Oxygen concentration ≤ 1× 1018atom/cm3
Carbon concentration ≤ 5× 1017atom/cm3
Dimension: 125mmX125mm± 0.5mm, 156mmX156mm± 0.5mm
Thickness: 200μm, 220μm, 240μm(± 20μm)
TTV: ≤ 50 μm
Squareness Angle Variety: <0.6mm
Squareness Angle: 90° ± 0.25°
Crystal direction: ≤ 100≥